Experts in Substrate Heating

Vacuum Heaters

At Thermic Edge, we pride ourselves on being at the forefront of the vacuum heating industry. Providing a complete service, our bespoke versatile ranges give you the tools necessary for any application.

Vacuum Heaters Overview

At Thermic Edge, we supply cost-effective, high uniformity sample heaters to research and industry for thin film deposition and sample processing. Sample heaters can be supplied with retainers or clips to hold a range of semiconductor wafers or samples.

All heaters go through comprehensive testing. Our in-house testing capabilities include helium leak checking, full temperature testing using vacuum test system and uniformity testing using a FLIR thermal imaging camera. Thermic Edge is ISO 9001:2015 registered.

The Thermic Edge design team work closely with clients to provide:

  • Professionally managed projects from start to finish
  • Cost effective solutions using standard Thermic Edge components and assemblies where possible
  • Detailed technical drawings and written specifications
  • 3D CAD models
  • A heating solution that is supplied fully tested and ready to integrate with your system
  • Manual detailing installation and operation instructions

Versatile Heaters

800°C - 1600°C [ O2, Inert, HV, UHV ]

Versatile Heaters

800°C - 1600°C [O2, Inert, HV, UHV]

Button Heaters

800°C - 1400°C [ Air, HV, UHV ]

Button Heaters

800°C - 1400°C [ Air, HV, UHV ]

All Ceramic Heaters

800°C - 1600°C [ Air, HV, UHV ]

All Ceramic Heaters

800°C - 1600°C [Air, HV, UHV]

Nickel Chrome Heaters

800°C - 1000°C [ Air, Inert, HV ]

Nickel Chrome Heaters

800°C - 1000°C [ Air, Inert, HV ]

High Temperature - High Uniformity - Water Cooled Heaters

1000°C - 1700°C [ Air, Inert, HV ]

High Temperature - High Uniformity - Water Cooled Heaters

1000°C - 1700°C [ Air, Inert, HV ]

PG-PBN Heaters

800°C - 1400°C [ Air, HV, UHV ]

PG-PBN Heaters

800°C - 1400°C [ Air, HV, UHV ]

Bespoke Heaters

Custom Specification Builds

Bespoke Heaters

Custom Specification Builds

Get a Quote Today!

Bespoke Options

Contact our technical sales team today if you need any assistance or a larger heater size.

Additional Options include, but are not limited to:

  • Water cooling to minimise heat load on chamber and other equipment
  • Sample holder clips, masks or retainers
  • Flange or heater stage mouting (for rotation and sample transfer)
  • Sample bias (DC or RF up to 1000W)
  • Power Supply
  • Temperature Controller
  • Spare elements
  • Second thermocouple

Downloadables

See our list of available element types for our standard and bespoke heater ranges here

204.03-A - A4 - Elements Overview

Click to Download our product brochure for all Thermic Edge Element materials.

Request a Quote

Get a competitive quote from our sales team today!