Thermic Edge Sample Heaters

Ceramic Topped Substrate (Sample) Heater with NiCr Element and Stainless Steel Body (No Water Cooling Required)

800c maximum top plate temperature. Suitable for use in High vacuum or in Air. Enclosed element, protected from deposition product. Sample can be placed directly onto heater ceramic top plate. Standard sizes from dia1” to dia 8”. Easily adapted for special larger sizes and square / rectangular heater requirements.

Ceramic Topped Substrate (Sample) Heater With CCC (Carbon-Carbon Composite) Element & Inconel Body (No Water Cooling Required)

1000c maximum top plate temperature. Very fast ramp rate. Suitable for use in UHV (with PG coating), High vacuum or inert atmosphere. Enclosed element, protected from deposition product. Sample can be placed directly onto heater ceramic top plate. Standard sizes from dia1” to dia 8”. Easily adapted for special larger sizes and square / rectangular heater requirements.

Ceramic Topped Sample (Substrate) Heater With SiC Coated Graphite Element & Inconel Body (No Water Cooling Required)

1000c maximum top plate temperature. Very fast ramp rate. Suitable for use in UHV, High vacuum or Air. Enclosed element, protected from deposition product. Sample can be placed directly onto heater ceramic top plate. Standard sizes from dia1” to dia 6”. Larger sizes are available as specials.

Low Mass Ceramic Composite (Tungsten / Aluminium Nitride) Element Heater With Stainless Steal / Inconel Body (No Water Cooling Required)

1200c maximum top plate temperature. Very fast ramp rate, with low mass and high thermal conductivity. Suitable for use in High vacuum or Air (to 1000c). Encapsulated tungsten element is completely protected from deposition product. Sample can be placed directly onto heater ceramic element plate. Only currently available in dia 2” and dia 4”. Special sizes are available but on long lead time.

Low Mass Ceramic Composite (PBN / PG / PBN) Element Heater With Stainless Steel, Inconel Or Molybdenum Body (Depending On Max Temperature). Water Cooling Not Required.

1600c maximum top plate temperature. Very fast ramp rate, with low mass and very inert. Suitable for use in UHV, High vacuum or Air (to 900c). PG (Pyrolytic Graphite) element is encapsulated in PBN (Pyrolytic Boron Nitride) completely protected from deposition product. Sample can be placed directly onto heater ceramic element plate. Only currently available in sizes up to 4” square or round.

Ceramic topped sample (substrate) heater with CCC (carbon carbon composite) element and water cooled stainless steel / Molybdenum body.

1000c maximum top plate temperature (higher temperatures available as specials). Very fast ramp rate. Suitable for use in UHV (with PG coating), High vacuum or inert atmosphere. Enclosed element, protected from deposition product. Sample can be placed directly onto heater ceramic top plate. Standard sizes from dia1” to dia 8”. Easily adapted for special larger sizes and square / rectangular heater requirements. Available with very high uniformity hot zones.

Ceramic topped small sample heater with CCC (carbon carbon composite) element and water cooled stainless steel / Molybdenum body.

1700c maximum top plate temperature. Very fast ramp rate. Suitable for use in UHV (with PG coating), High vacuum or inert atmosphere. Enclosed element, protected from deposition product. Sample can be placed directly onto heater ceramic top plate. Standard sizes from dia1” to dia 2”. Easily adapted for special larger sizes and square / rectangular heater requirements. Available with very high uniformity hot zones.

Ceramic Topped Sample Heater With SiC Coated Graphite Element And Water Cooled Stainless Steel / Inconel Body

1200c maximum top plate temperature. Very fast ramp rate. Suitable for use in UHV, High vacuum or Air. Enclosed element, protected from deposition product. Sample can be placed directly onto heater ceramic top plate. Standard sizes from dia1” to dia 6”. Larger sizes are available as specials. Available with very high uniformity hot zones.

All Graphite Cooled or Uncooled Heater With Graphite or Ceramic Top Plate and CCC Element

1900c maximum top plate temperature. Very fast ramp rate. Suitable for use in UHV, High vacuum or inert atmosphere. Enclosed element, protected from deposition product. Sample can be placed directly onto heater ceramic / graphite top plate. Standard sizes from dia1” to dia 6”. Larger sizes are available as specials. Does not require water cooling and dimensionally very stable. Can be CVD coated with PBN, SiC or PG if required.

All Molybdenum Uncooled Heater With Ceramic Top Plate And CCC Element

1800c maximum top plate temperature. Very fast ramp rate. Suitable for use in UHV, High vacuum or inert atmosphere. Enclosed element, protected from deposition product. Sample can be placed directly onto heater ceramic top plate. Standard sizes from dia1” to dia 6”. Larger sizes are available as specials. Does not require water cooling.

Low Mass, Low Cost, Exposed CCC Element, Mounted On Inconel / Stainless Steel Base Including Heatshields

1200c maximum element temperature. Very fast ramp rate and low cost. Suitable for use in High vacuum or inert atmosphere. Exposed CCC element is mounted on a metal base plate, with ceramic supports and foil parallel and radial heatshields. Standard sizes from dia 2” to dia 6”. Larger sizes and square / rectangular profiles are available as specials. Does not require water cooling.

Rectangular And Square Heaters

We can produce bespoke square and rectangular substrate heaters and heater stages for all temperatures and environments, both in high vacuum and atmospheric pressures. Heaters can be designed to suit our customer’s specific requirements, with and without water cooling.

Biased Heaters

We can add substrate bias to our static heaters, both for RF and DC bias. We can also produce biased hot stages, with sample rotation, tilting, and automatic or manual sample transfer for top and bottom mounted hot stages. Please see our hot stages page for more detailed information on our hot stages with rotation and sample transfer.

All Heater Types ~ More Photos

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