• Heater Stages

Heater Stages

Thermic Edge offers a complete range of hot stages for all deposition system applications. We have stages for mounting in any orientation with features including; static heater with sample rotation via central shaft or sample rotation via outer cradle, sample rotation by rotating heater assembly, RF sample bias to 1000w, DC sample bias to 1000w, Z movement for sample transfer or pin lift, Z movement to change source to sample / heater distance. Sample transfer solutions for top and bottom mounted stages. Our heater stages can incorporate all of the above heater types.

Thermic Edge hot stages range has six different standard Airside models, that can mount any of the standard heater head types (NiCr, Lamps, CCC or Graphite + SiC coating), in any orientation. They permit different configurations to suit every requirement.  Any flange type can be used, although it is recommended to have a large enough bore to allow the heater head to pass through fully assembled. All of them have optional Z shift for automatic or manual sample transfer with a linear manipulator.

SMF01 Heater

Classic stage with central rotating shaft, offset motor and detachable sample holder

  • Sample heating to 1000C
  • Central shaft, through static heater, rotates the sample holder in front of heater. Motor offset with belt drive.
  • Power, water and thermocouple cables routed to individual feedthroughs on base flange.
  • Optional RF/DC bias applied through central shaft up to 1kw with 7/16” or N type coaxial connector.
  • Includes airside RF shielding.
  • Optional Z shift for sample transfer, by raising / lower central shaft connected to sample holder.
  • Optional Z shift for changing sample to source distance, by moving entire heater / sample assembly.
  • Optional water cooling on outer heatshields, to reduce heat load on chamber.

SMF02 Heater

Same as classic stage SMF01 but services routed through central tube, with feedthroughs included on the stage

  • Sample heating to 1000C.
  • Central shaft, through static heater, rotates the sample holder in front of heater. Motor offset with belt drive.
  • Power and thermocouple cables route through central shaft to feedthroughs mounted on the stage. Base flange feedthroughs are not required.
  • Optional RF/DC bias applied through central shaft up to 1kw with 7/16” or N type coaxial connector.
  • Includes airside RF shielding.
  • Optional Z shift for sample transfer, by raising / lower central shaft connected to sample holder.
  • Optional Z shift for changing sample to source distance, by moving entire heater / sample assembly.
  • Optional water cooling on outer heatshields, to reduce heat load on chamber.
  • Optional Water cooled heaters can have water lines routed through central shaft also or to separate feedthrough on base.

SMF03 Heater

Same as classic stage SMF01 but motor connected directly to central shaft

  • Sample heating to 1000C
  • Central shaft, through static heater, rotates the sample holder in front of heater. Motor connected directly to shaft.
  • RF / DC bias not available with this stage
  • Power, water and thermocouple cables routed to individual feedthroughs on base flange.
  • Optional Z shift for sample transfer, by raising / lower central shaft connected to sample holder.
  • Optional Z shift for changing sample to source distance, by moving entire heater / sample assembly.
  • Optional water cooling on outer heatshields, to reduce heat load on chamber.

SMF04 Heater

Static stage without sample rotation

  • Sample heating to 1800C
  • Basic static heater stage, no rotation.
  • Cables can pass through central tube or go to individual feedthroughs on base flange.
  • Optional RF / DC sample bias.
  • Optional Z shift for wafer transfer by pin lift or central shaft lift.
  • Very high temperature heaters can be fitted to this stage

SMF05 Heater

Rotating heater stage, sample attaches directly to rotating heater

  •  Sample heating to 1800C
  • Heater mounts on rotating tube, entire heater rotates with sample fixed to heater face.
  •  Motor offset with belt drive.
  • Power and thermocouple cables route through central shaft including vacuum feedthroughs terminating with an airside slip ring assembly.
  • Optional RF/DC bias applied through central tube up to 1kw with 7/16” or N type coaxial connector.
  • Includes airside RF shielding.
  • Sample transfer not possible, manual loading of sample onto heater only.
  • Optional Z shift for changing sample to source distance, by moving entire heater / sample assembly.
  • Optional water cooling on static outer heatshields, to reduce heat load on chamber. Water lines routed to feedthrough on base flange.

SMF06 Heater

Rotating outer cradle stage, solid static heater without central hole

  • Sample heating to 1200C
  • Heater mounts on static central tube. A cradle supports the substrate and rotates outside of the heater holding the sample in front of the heater.
  • Motor offset with belt drive.
  • Power and thermocouple cables route through central shaft including vacuum feedthroughs.
  • Optional RF/DC bias applied through central tube onto cradle, up to 600kw with 7/16” or N type coaxial connector.
  • Includes airside RF shielding.
  • Optional Z shift raises and lowers cradle for sample transfer.
  • Optional Z shift for changing sample to source distance, by moving entire heater / sample cradle assembly.
  • Optional water cooling on static heater body, to reduce heat load on chamber. Water lines routed through central tube to feedthrough.

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