• Thermic Edge Laboratory Vacuum Furnace Range

Thermic Edge has a standard range of 2100c laboratory vacuum furnaces with graphite hot zones and inert gas injection for processing from atmospheric pressure to high vacuum, but we can also offer specially built or modified versions of the standard furnaces, with Graphite hot zones up to 3000c and Tungsten hot zones up to 2600c.

2100C Laboratory Vacuum Furnaces with Graphite Hot Zones

The Thermic edge 2100C range of laboratory furnaces are semi-automatic with top loading graphite hot zone that heats different sample sizes up to 2100C. The atmosphere can be either vacuum or inert gas. The furnace range has been designed to be very simple to operate, while incorporating extensive safety features, and also be durable and reliable.

The furnace provides simple operation by using single buttons for PUMP – VENT – GAS ON – GAS OFF. Thermal control is via the RKC or Eurotherm programmable PID temperature controllers, which can be programmed from the front panel or by connecting to a laptop or PC. The controllers can store thermal recipes and log data from each run.

The automated pump down sequence includes a number of pump and purge cycles, to remove residual oxygen (which can damage the hot zone by oxidation above 500C). This greatly increases the life of the graphite hot zone, and enables the furnace to run well on just a rotary pump, without the need for a second high vacuum pump.

The system consists of a vacuum chamber mounted in a wheeled frame. The vacuum chamber is flush with the work top, to allow easy access to hot zone. A PLC is integrated in the frame to control the heating sequence, the pumping process, venting, gas admission and interlocks. The interlocked electric lid lift ensures the furnace cannot be opened if the hot zone temperature is too high. Red / Green LED’s on the front of the furnace show the state of all of the furnace safety interlocks.

The Pump Down Sequence

The automated pump down sequence, initiated by pressing a single pump button, includes a number of pump and purge cycles, to remove residual oxygen (which can damage the hot zone by oxidation above 500C). This greatly increases the life of the graphite hot zone, and enables the furnace to run well on just a rotary pump, without the need for a second high vacuum pump. High vacuum Turbo molecular or Diffusion pumps are available as an option.

The Furnace Structure

The system consists of a vacuum chamber mounted in a wheeled frame. The vacuum chamber is flush with the work top, to allow easy Top access to the hot zone. A PLC is integrated in the furnace control box  to control the heating sequence, the pumping process, venting, gas admission and interlocks. The electric lid lift ensures the furnace cannot be opened if the hot zone temperature is too high. The latest range of furnaces are powered by the extremely light weight and compact DC switch mode power supplies, which offer a significant weight and size reduction over the previous AC transformer / thyristor power supplies. The DC supplies also display hot zone power and current on digital displays, as well as having a manual current limit control knob.

All services connect to the furnace from the rear. Services required are 3 phase power, cooling water, vent gas (can also operate pneumatic valves if required), process gas and Pneumatic gas (If not using vent gas for furnace pneumatic valves). See the schematic drawing on the right (click to enlarge) for furnace size and services layout.

Main Characteristics & Advantages

  • 2100°C sample heating.
  • All graphite hot zone.
  • Simple operation: 1 Button Pump - 1 Button Vent.
  • High vacuum pumping option.
  • Water cooled chamber.
  • Fast ramping.
  • Process in vacuum/inert gass to atmospheric pressure.
  • Programmable RKC or Eurotherm PID temperature controller.
  • Automatic dilution pumping sequence to give low residual O2 with just a rotary pump.
  • Compact and light weight construction with four durable castor wheels for easy movement.
  • Precise power control with compact light weight DC switch mode power supply with voltage and current displays and current limit.
  • Pumps integrated: Edwards RV 8 (roughing pump) and optional 'Turbopump EXT75DX' or 'Diffusion pump' (fine pumping).
  • Safely interlocks that ensure safe operation and maintain operator and furnace safety at all times.
  • Electric lid lift which is interlocked to prevent opening if hot zone temperature is too high.
  • Venting: N2 or Ar. 100 lts/s. 100psifor venting – Less than 10psi, 5 ltr/min. 6mm Swagelok fitting.

Furnace Sizes

  • Small Furnace: 1cc crucibles (Ø11.5mm, h:20mm). Power 2400VA 208 / 240 volts

 

  • Medium furnace: Crucible inner dimensions: Ø60.5mm, height: 75mm, Power 7,800VA 208 / 240 volts

 

  • Large furnace: Crucible inner dimensions: Ø: 150mm, height: 75mm , Power 12,000VA ∅208 / 240 volts

  

  • ∅4″ x 2″ high furnace: with side and base heating for uniform heating of thick  ∅4″ samples. Power 5,100VA 208 / 240 volts 3 phase

 

  •   ∅8″ flat furnace: ideal to heat up several samples or single wafer up to 8 inch at the same time. The flat furnace can have single zone or dual zone for high thermal uniformity. Power 14,000VA 208 / 240 volts

3000c Laboratory Furnaces with all graphite hot zones

Our 3000c  Furnaces are very similar to the design of the standard graphite hot zone furnaces with a few changes:-

1- Above 2100c they must operate at atmospheric pressure in Ar or He

2- Much larger power supplies are required

3- Pyrometer control is required

Tungsten hot zone Furnace

Thermic Edge can also supply vacuum furnaces with a Tungsten hot zone for heating up to 2600C with Nitrogen or Hydrogen process gas. The hot zone is heated using a Tungsten mesh element, with heat shielding provided by Tungsten foil heat shields.

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