1A - Carbon Carbon Composite (CCC) Elements

2600c maximum temperature, for use in UHV, high vacuum or inert atmosphere (Not suitable for use in O2 above 500c). High strength, Low cost, high power density element, available as a single element in sizes up to 1000mm x 1000mm, mainly used for flat elements due to raw material availability. Standard element sizes available from stock. Standard thicknesses from 1.2mm. Will not age harden and get stronger with temperature. Our number one choice of element in non-oxidising atmosphere.

1B - Graphite Elements

2600c maximum temperature, for use in UHV, high vacuum or inert atmosphere (Not suitable for use in O2 above 500c). Raw material available in large blocks, so mainly used for tubular elements, or where flat element requires a cvd coating such as SiC, PBN or PG.

1C - SiC Coated Graphite Elements

1500c maximum temperature, SiC coating gives the following properties to the graphite element: electrical insulator, very hard, reduced particles and Oxidation resistant. Requires exposed graphite area to connect power. This area must be kept below 500c in oxidising atmosphere.

1D - PBN Coated Graphite Element

1900c maximum temperature, PBN coating gives the following properties to the graphite element: electrical insulator, chemically inert, reduced particles and Oxidation resistant to 900c. Requires exposed graphite area to connect power. This area must be kept below 500c in oxidising atmosphere.

1E - PG Coated Elements

2100c maximum temperature, PG coating eliminates porosity and particles resulting in an element more suitable for UHV or zero particle applications. Suitable for use in UHV, High vacuum or inert atmospheres.

1F - NiCr Elements In Ceramic

1000c maximum temperature, for use in high vacuum or air. Low cost reliable element consisting of a NiCr coil fixed into a ceramic (Boron Nitride Silica) body.

1G - Refractory Metal Element

2600c maximum temperature, for use in UHV, high vacuum or inert atmosphere (Not suitable for use in O2 above 500c). Refractory metal elements are laser cut from sheet metal or wound into a coil from wire in Molybdenum, Tungsten, Tantalum or Niobium. These elements are not held as standards but are made to order.

1H - AIN Heating Elements

1200c maximum top plate temperature. Very fast ramp rate, with low mass and high thermal conductivity. Suitable for use in High vacuum or Air (to 1000c). Encapsulated tungsten element is completely protected from deposition product. Sample can be placed directly onto ceramic element. Only currently available in dia 2” and dia 4”. Special sizes are available but on long lead time. Has exposed tungsten power connection points on tabs at side of hot zone.

I - Elements in Ceramic Housing

A ccc, pg, graphite or refractory metal heating element mechanically mounted in a ceramic housing, consisting of an aluminium nitride top plate with a choice of ceramic bases (boron nitride, aluminium nitride, BNS26, Alumina) held together with ceramic screws. 1800C maximum top plate temperature, low mass, fast response, with the ability to easily change the element at low cost.

J - PG PBN Elements

1600c maximum temperature. Very fast ramp rate, with low mass and very inert. Suitable for use in UHV, High vacuum or Air (to 900c). PG (Pyrolytic Graphite) element is encapsulated in PBN (Pyrolytic Boron Nitride) completely protected from deposition product. Sample can be placed directly onto heater ceramic element plate. Only currently available in sizes up to 4” square or round. Has exposed PG power connection points on tabs at side of hot zone.

  • 1. Heater Elements only
  • 2. Heater Selection Guide

Heater Elements only

(without housing)

a

CCC (Carbon Carbon Composite) element

2600c maximum temperature, for use in UHV, high vacuum or inert atmosphere (Not suitable for use in O2 above 500c). High strength, Low cost, high power density element, available as a single element in sizes up to 1000mm x 1000mm, mainly used for flat elements due to raw material availability. Standard element sizes available from stock. Standard thicknesses from 1.2mm. Will not age harden and get stronger with temperature. Our number one choice of element in non-oxidising atmosphere.

b

High Density Graphite element

2600c maximum temperature, for use in UHV, high vacuum or inert atmosphere (Not suitable for use in O2 above 500c). Raw material available in large blocks, so mainly used for tubular elements, or where flat element requires a cvd coating such as SiC, PBN or PG.

c

High Density Graphite element + SiC (Silicon Carbide) coating.

1500c maximum temperature, SiC coating gives the following properties to the graphite element: electrical insulator, very hard, reduced particles and Oxidation resistant. Requires exposed graphite area to connect power. This area must be kept below 500c in oxidising atmosphere.

d

High Density Graphite element + PBN (Pyrolytic Boron Nitride) coating.

1900c maximum temperature, PBN coating gives the following properties to the graphite element: electrical insulator, chemically inert, reduced particles and Oxidation resistant to 900c. Requires exposed graphite area to connect power. This area must be kept below 500c in oxidising atmosphere.

e

High Density Graphite or CCC element + PG (Pyrolytic Graphite) coating.

2100c maximum temperature, PG coating eliminates porosity and particles resulting in an element more suitable for UHV or zero particle applications. Suitable for use in UHV, High vacuum or inert atmospheres.

f

NiCr coil element in Ceramic body.

1000c maximum temperature, for use in high vacuum or air. Low cost reliable element consisting of a NiCr coil fixed into a ceramic (Boron Nitride Silica) body.

g

Refractory metal element.

2600c maximum temperature, for use in UHV, high vacuum or inert atmosphere (Not suitable for use in O2 above 500c). Refractory metal elements are laser cut from sheet metal or wound into a coil from wire in Molybdenum, Tungsten, Tantalum or Niobium. These elements are not held as standards but are made to order.

h

Low mass Rapid response Ceramic composite (Aluminium nitride / Tungsten / Aluminium nitride) element

1200c maximum top plate temperature. Very fast ramp rate, with low mass and high thermal conductivity. Suitable for use in High vacuum or Air (to 1000c). Encapsulated tungsten element is completely protected from deposition product. Sample can be placed directly onto ceramic element. Only currently available in dia 2” and dia 4”. Special sizes are available but on long lead time. Has exposed tungsten power connection points on tabs at side of hotzone.

i

Low mass Rapid response Ceramic composite (PBN / PG / PBN) element.

1600c maximum temperature. Very fast ramp rate, with low mass and very inert. Suitable for use in UHV, High vacuum or Air (to 900c). PG (Pyrolytic Graphite) element is encapsulated in PBN (Pyrolytic Boron Nitride) completely protected from deposition product. Sample can be placed directly onto heater ceramic element plate. Only currently available in sizes up to 4” square or round. Has exposed PG power connection points on tabs at side of hotzone.

Standard & Sample Heaters

All can be flange mounted (including feedthroughs) or stand alone with mounted stud or brackets

Heater Selection Guide

Heater type Max surface Temp C
Vacuum O2 Inert Gas Ramp rate Water cooled Max Size mm Cost Standard voltage
Halogen Lamp heater uncooled 800 800 800 High No 4″ Very Low 110v / 240v
Ceramic topped sample heater with NiCr element and stainless steel body uncooled 800 800 800 Low No 12″ Low 50v / 110v / 240v
Ceramic topped sample heater with CCC element and inconel body uncooled 1000 300 1000 High No 12″ Medium 50v
Ceramic topped sample heater with SiC coated graphite element and inconel body uncooled 1000 1000 1000 High No 12″ High 50v
Low mass Ceramic composite (AlN / W / AlN) element heater with stainless steel body uncooled 800 800 800 High No 6″ Low 110v / 240v
Low mass Ceramic composite (AlN / W / AlN) element heater with Inconel body uncooled 1000 1000 1000 High No 6″ Low 110v / 240v
Low mass Ceramic composite (AlN / W / AlN) element heater with Molybdenum body uncooled 1400 1000 1400 High No 6″ Low 110v / 240v
Low mass Ceramic composite (PBN / PG / PBN) element heater with stainless steel body uncooled 800 800 800 High No 4″ High 50v / 110v / 240v
Low mass Ceramic composite (PBN / PG / PBN) element heater with Inconel body uncooled 1000 900 1000 High No 4″ High 50v / 110v / 240v
Low mass Ceramic composite (PBN / PG / PBN) element heater with Molybdenum body uncooled 1600 900 1600 High No 4″ High 50v / 110v / 240v
Ceramic topped sample heater with CCC element and stainless steel / Molybdenum body water cooled 1800 300 1800 High Yes 12″ High 50v
Ceramic topped sample heater with SiC coated graphite element and  stainless steel / inconel body water cooled 1200 1200 1200 High Yes 12″ High 50v
All graphite heater with graphite or ceramic top plate and CCC element uncooled 1800 300 1800 High No 12″ Medium 50v
All Molybdenum heater with ceramic top plate and CCC element uncooled 1800 300 1800 High No 12″ Medium 50v
All graphite heater with graphite or ceramic top plate and CCC element water cooled 1800 300 1800 High Yes 12″ Medium 50v
All Molybdenum heater with ceramic top plate and CCC element water cooled 1800 300 1800 High Yes 12″ Medium 50v
Low mass, Low cost exposed CCC element, mounted on stainless steel base including heatshields 1000 300 1000 High No 1000 x 1000 mm Very Low 50v
Low mass, Low cost exposed CCC element, mounted on Inconel base including heatshields 1200 300 1200 High No 1000 x 1000 mm Very Low 50v
Heater Type Reliability Positive points Negative points
Halogen Lamp heater uncooled Low Low cost, fast ramping, low mass so faster cooling Bulbs are unrealiable need constant changing. Bulbs can be affected by deposition product
Ceramic topped sample heater with NiCr element and stainless steel body uncooled High Low cost, reliable, not affected by deposition product. Slow ramp rate, large mass so slow cooling rate
Ceramic topped sample heater with CCC element and inconel body uncooled High Very reliable, fast ramping, not affected by deposition Not suitable for oxidising atmosphere, element can give off particles.
Ceramic topped sample heater with SiC coated graphite element and inconel body uncooled High O2 resistant, fast ramp, low particles, chemically inert, element electrically insulated High cost, elements are fragile, exposed graphite power pad must be kept below 500c in O2
Low mass Ceramic composite (AlN / W / AlN) element heater with stainless steel body uncooled No Data Low cost, low mass, fast ramping, high thermal conductivity, electrically insulated, fast cooling Limited sizes, long lead times on new sizes, New product reliability unknown.
Low mass Ceramic composite (AlN / W / AlN) element heater with Inconel body uncooled No Data Low cost, low mass, fast ramping, high thermal conductivity, electrically insulated, fast cooling Limited sizes, long lead times on new sizes, New product reliability unknown.
Low mass Ceramic composite (AlN / W / AlN) element heater with Molybdenum body uncooled No Data Low cost, low mass, fast ramping, high thermal conductivity, electrically insulated, fast cooling Limited sizes, long lead times on new sizes, New product reliability unknown.
Low mass Ceramic composite (PBN / PG / PBN) element heater with stainless steel body uncooled Low-Medium Low mass, fast ramping, chemically inert, electrically insulated, fast cooling Limited sizes, high cost, can be unreliable and delaminate at very high temperatures
Low mass Ceramic composite (PBN / PG / PBN) element heater with Inconel body uncooled Low-Medium Low mass, fast ramping, chemically inert, electrically insulated, fast cooling Limited sizes, high cost, can be unreliable and delaminate at very high temperatures
Low mass Ceramic composite (PBN / PG / PBN) element heater with Molybdenum body uncooled Low-Medium Low mass, fast ramping, chemically inert, electrically insulated, fast cooling Limited sizes, high cost, can be unreliable and delaminate at very high temperatures
Ceramic topped sample heater with CCC element and stainless steel / Molybdenum body water cooled High Very reliable, fast ramping, not affected by deposition, dimensionally stable, will not overheat. Not suitable for oxidising atmosphere, element can give off particles.
Ceramic topped sample heater with SiC coated graphite element and  stainless steel / inconel body water cooled High O2 resistant, fast ramp, low particles, chemically inert, element electrically insulated High cost, elements are fragile
All graphite heater with graphite or ceramic top plate and CCC element uncooled High Very reliable, fast ramping, not affected by deposition, dimensionally very stable. Not suitable for oxidising atmosphere, element can give off particles. High thermal emission to chamber.
All Molybdenum heater with ceramic top plate and CCC element uncooled High Very reliable, fast ramping High mass slow cooling in vacuum.
All graphite heater with graphite or ceramic top plate and CCC element water cooled High Very reliable, fast ramping, not affected by deposition, dimensionally very stable. Not suitable for oxidising atmosphere, element / body can give off particles.
All Molybdenum heater with ceramic top plate and CCC element water cooled High Very reliable, fast ramping, faster cooling in vacuum
Low mass, Low cost exposed CCC element, mounted on stainless steel base including heatshields No Data Very low cost, fast ramp, low mass, fast cooling Element exposed to deposition product, not dimensionally stable, fragile construction
Low mass, Low cost exposed CCC element, mounted on Inconel base including heatshields No Data Low cost, fast ramp, low mass, fast cooling Element exposed to deposition product, not dimensionally stable, fragile construction
  • Halogen Lamp heater uncooledShow detailsHide details

    Comments

    Pros: Low cost, fast ramping, low mass so faster cooling.

    Cons: Bulbs are unreliable need constant changing, Bulbs can be affected by deposition product.

  • Ceramic topped sample heater with NiCr element and stainless steel body uncooledShow detailsHide details

    Comments

    Pros: Low cost, reliable, not affected by deposition product.

    Cons: Slow ramp rate, large mass so slow cooling rate.

  • Ceramic topped sample heater with CCC element and inconel body uncooledShow detailsHide details

    Comments

    Pros: Very reliable, fast ramping, not affected be deposition.

    Cons: Not suitable for oxidising atmosphere, element can give off particles.

  • Ceramic topped sample heater with SiC coated graphite element and inconel body uncooledShow detailsHide details

    Comments

    Pros: O2 resistant, fast ramp, low particles, chemically inert, element electrically insulated.

    Cons: High cost, elements are fragile, exposed graphite power pad must be kept below 500c in O2.

  • Low mass ceramic composite (AIN / W / AIN) element heater with stainless steel body uncooledShow detailsHide details

  • Low mass Ceramic (AIN / W / AIN) element heater with inconel body uncooledShow detailsHide details

    Comments

    Pros: Low cost, low mass, fast ramping, high thermal conductivity, electrically insulated, fast cooling.

    Cons: Limited sizes, long lead times on new sizes, new product reliability unknown.

  • Low mass ceramic composite (AIN / W / AIN) element heater with molybdenum body uncooledShow detailsHide details

    Comments

    Pros: Low cost. low mass, fast ramping, high thermal conductivity, electrically insulated, fast cooling.

    Cons: Limited sizes, long lead times on new sizes, new product reliability unknown.

  • Low mass ceramic composite (PBN / PG / PBN) element heater with stainless steel body uncooledShow detailsHide details

    Comments

    Pros: Low mass, fast ramping, chemically inert, electrically insulated, fast cooling.

    Cons: Limited sizes, high cost, can be unreliable and delaminate at very high temperatures.

  • Low mass ceramic composite (PBN / PG / PBN) element heater with inconel body uncooledShow detailsHide details

    Comments

    Pros: Low mass, fast ramping, chemically inert, electrically insulated, fast cooling.

    Cons: Limited sizes, high cost, can be unreliable and delaminate at very high tempertures.

  • Low mass ceramic composite (PBN / PG / PBN) element heater with molybdenum body uncooledShow detailsHide details

    Comments

    Pros: Low cost, low mass, fast ramping, high thermal conductivity, electrically insulated, fast cooling.

    Cons: Limited sizes, long lead times on new sizes, new product reliability unknown.

  • Ceramic topped sample heater with CCC element and stainless steel / molybdenum body water cooledShow detailsHide details

    Comments

    Pros: Very reliable, fast ramping, not affected by deposition, dimensionally stable, will not overheat.

    Cons: Not suitable for oxidising atmosphere, element can give off particles.

  • Ceramic topped heater with SiC coated graphite element and stainless steel / inconel body water cooledShow detailsHide details

    Comments

    Pros: O2 resistant, fast ramp, low particles, chemically inert, element electrically insulated.

    Cons: High cost, elements are fragile.

  • All graphite heater with graphite or ceramic top plate and CCC element uncooledShow detailsHide details

    Comments

    Pros: Very reliable, fast ramping, not affected by deposition, dimensionally very stable.

    Cons: Not suitable for oxidising atmosphere, element can give off particles, high thermal emission to chamber.

  • All molybdenum heater with ceramic top plate and CCC element uncooledShow detailsHide details

    Comments

    Pros: Very reliable, fast ramping

    Cons: High mass slow cooling in vacuum.

  • All graphite heater with graphite or ceramic top plate and CCC element water cooledShow detailsHide details

    Comments

    Pros: Very reliable, fast ramping, not affected by deposition, dimensionally very stable.

    Cons: Not suitable for oxidising atmosphere, element / body can give off particles.

  • All molybdenum heater with ceramic top plate and CCC element water cooledShow detailsHide details

    Comments

    Pros: Very reliable, fast ramping, faster cooling in vacuum.

    Cons:

  • Low mass, low cost expossed CCC element, mounted on stainless steel base including heatshieldsShow detailsHide details

    Comments

    Pros: Very low cost, fast ramp, low mass, fast cooling.

    Cons: Element exposed to deposition product, not dimensionally stable, fragile construction.

  • Low mass, low cost exposed CCC element, mounted on inconel base including heatshieldsShow detailsHide details

    Comments

    Pros: Low cost, fast ramp, low mass, fast cooling.

    Cons: Element exposed to deposition product, not dimensionally stable, fragile construction.

Standard Thermic Edge Elements

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