Penetration (Image One)
A huge advantage of SIC3 manufactured by the CVD technology, over line of sight process, is its “throwing power” or penetration depth. Hole diameters down to 1mm can be coated to a depth of 5mm, while still maintaining 30% layer thickness at its deepest point. Even more consistent layer thicknesses can be achieved when larger diameter holes are coated.
Protective coating for graphite components used in MOCVD, EPI, Semiconductor and LED manufacturing.
SiC3 Ceramic Coating
SiC3, short for cubic silicon carbide, is the isotropic, pure silicon carbide coating manufactured by Thermic Edge Coatings for a wide range of applications. High temperature resistant materials such as graphite, SiCbased ceramics and some refractory metals such as tungsten and molybdenum can be coated in SiC3. The coating protects the underlying material against corrosion, oxidation, acts as a diffusion barrier and prevents absorption and desorption of impurities from the underlying material which can interfere with your processes. The coating also prevents particles from the underlying material interfering with the process or device to be made in the process. In combination with porous materials such as graphite, the upper layer of graphite is infiltrated with SiC3 coating, resulting in ultimate adhesion and corrosion protection. Applications can be found in the semi-conductor industry. LED manufacturing, solar, special heat treatment and aerospace.
Thermic Edge Coatings
As an independent coating supplier, Thermic Edge works closely together with local suppliers of graphite and SiC ceramic components to offer short delivery times, competitive cost and the highest quality standards. The coating produced has a preferential cubic, 3C structure which gives the best corrosion protection when compared to other SiC structures. Not restricted to specific graphite qualities or other material grades we can provide bespoke solutions for bespoke problems.
Technology and general characteristics
Thermic Edge Coatings uses CVD technology to manufacture thin SiC3 layers between 10 and 200 µm. The coating produced has a preferential cubic, 3C structure which gives the best corrosion protection when compared to other SiC structures. Standard thickness is 80 – 100 µm and the technology allows to cover all areas with a dense coating. Small, blind holes are coated even for holes with a 1 mm diameter and over 5 mm depth.
Products are placed in the Thermic Edge Coatings in-house reactor on pure materials compatible to the process such as purified graphite and pre-coated SiC3 support materials. Combined with the use of semiconductor grade gases, it leads to a coating with minimum impurity levels and therefore improved corrosion resistance. The design of the reactor ensures only highly pure materials are present in the high temperature zone, along with high purity gases which results in extremely pure layers with a high electrical resistivity. High temperature processes at end customers, have proven the outstanding quality of the SiC3 coating, often outperforming OEM based solutions.
Wafers (silicon, sapphire, SiC, GaN) treated will benefit from the high purity and well defined SiC3 interface. Thermal conductivity is high and thermal transfer is not limited through the coating. Other material properties conform with theoretical values.
Thermic Edge Coatings is committed to further investments and scaling up of it’s process, and in the near future will be able to coat larger sized parts. At the moment the maximum sized part is restricted to 360mm.