The process is unique as it combines a well defined crystal size, isotropic structure and low surface roughness. The high growth rates achieved by SiC3 (Silicon Carbide cubed) ensures that the product remains cost effective.

The coating can be used in semiconductor, aerospace and heating technologies. It will provide a high purity and impervious layer on graphite, porous ceramics and composites. The combination of graphite selection and graphite machining expertise, developed by Thermic Edge Coatings, will ensure that customers experience optimal support for various critical components within these industries.

For a detailed breakdown of SIC3, view our pdf.

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Thermic Edge Ltd are the sole manufacturers of SiC3 Coating, short for cubic silicon carbide.

Our Revolutionary SiC3 Coating Offers The Following Advantages:

  • Cubic structure giving high density coating
    This vastly improves corrosion resistance and increases the component’s life. Find out more here.
  • Excellent coverage down blind holes
    With 30% coating thickness down a Ø1x5mm deep hole.
  • High purity coating
    Is achievable by using high purity gases in the coating process, while also remaining low in N2 absorption to achieve higher than industry standard purity. Find out more here.
  • Adjustable surface roughness
    The coating process can be tailored to give different surface roughnesses.
  • Fast delivery
    Thermic Edge Ltd will ship with a short lead time.
  • SiC 3 Coating
  • SiC 3 General Properties
  • Elements & Applications of SiC 3

SiC 3 Coating - Silicon Carbide Coated Graphite

Penetration (Image One)

A huge advantage of SIC3 manufactured by the CVD technology, over line of sight process, is its “throwing power” or penetration depth. Hole diameters down to 1mm can be coated to a depth of 5mm, while still maintaining 30% layer thickness at its deepest point. Even more consistent layer thicknesses can be achieved when larger diameter holes are coated.

Applications

Protective coating for graphite components used in MOCVD, EPI, Semiconductor and LED manufacturing.

SiC3 Ceramic Coating

SiC3, short for cubic silicon carbide, is the isotropic, pure silicon carbide coating manufactured by Thermic Edge Coatings for a wide range of applications. High temperature resistant materials such as graphite, SiCbased ceramics and some refractory metals such as tungsten and molybdenum can be coated in SiC3. The coating protects the underlying material against corrosion, oxidation, acts as a diffusion barrier and prevents absorption and desorption of impurities from the underlying material which can interfere with your processes. The coating also prevents particles from the underlying material interfering with the process or device to be made in the process. In combination with porous materials such as graphite, the upper layer of graphite is infiltrated with SiC3 coating, resulting in ultimate adhesion and corrosion protection. Applications can be found in the semi-conductor industry. LED manufacturing, solar, special heat treatment and aerospace.

Thermic Edge Coatings

As an independent coating supplier, Thermic Edge works closely together with local suppliers of graphite and SiC ceramic components to offer short delivery times, competitive cost and the highest quality standards. The coating produced has a preferential cubic, 3C structure which gives the best corrosion protection when compared to other SiC structures. Not restricted to specific graphite qualities or other material grades we can provide bespoke solutions for bespoke problems.

Technology and general characteristics

Thermic Edge Coatings uses CVD technology to manufacture thin SiC3 layers between 10 and 200 µm. The coating produced has a preferential cubic, 3C structure which gives the best corrosion protection when compared to other SiC structures. Standard thickness is 80 – 100 µm and the technology allows to cover all areas with a dense coating. Small, blind holes are coated even for holes with a 1 mm diameter and over 5 mm depth.

Products are placed in the Thermic Edge Coatings in-house reactor on pure materials compatible to the process such as purified graphite and pre-coated SiC3 support materials. Combined with the use of semiconductor grade gases, it leads to a coating with minimum impurity levels and therefore improved corrosion resistance. The design of the reactor ensures only highly pure materials are present in the high temperature zone, along with high purity gases which results in extremely pure layers with a high electrical resistivity. High temperature processes at end customers, have proven the outstanding quality of the SiC3 coating, often outperforming OEM based solutions.

Wafers (silicon, sapphire, SiC, GaN) treated will benefit from the high purity and well defined SiC3 interface. Thermal conductivity is high and thermal transfer is not limited through the coating. Other material properties conform with theoretical values.

Thermic Edge Coatings is committed to further investments and scaling up of it’s process, and in the near future will be able to coat larger sized parts. At the moment the maximum sized part is restricted to 360mm.

General Properties

The coating can be used in semiconductor, aerospace and heating technologies. It will provide a high purity and impervious layer on graphite, porous ceramics and composites. The combination of graphite selection and graphite machining expertise, developed by Thermic Edge Coatings, will ensure that customers experience optimal support for various critical components within these industries.

Layer thickness can be varied but typically a layer of 80 – 100µm is achieved.

General Properties

Listed below are the typical values for some of the important properties for SIC3 . Some of these (i.e. crystal size, electrical resistivity) can be customised and optimised for specific applications.

SiC3 Specification

Property

Value

Density

3200 kg.m-3

Crystal Structure

3C (cubic; β)

Porosity

0% (helium leak tight)

Crystal Size

1 – 5 µm

Visual Appearance

Grey, satin to dull

Thermal Expansion (RT -400oC)

4.2 x 10-6m.K-1

Thermal Conductivity (@20oC)

200 W.m-1.K-1

Elastic Modulus

450 GPa

Electrical Resistivity (@20oC)

1MΩ.m

Elements

The following diverse selection of heaters have been used by customers worldwide for heating in O2 environments. A range of standard element sizes are available from stock.

Applications

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